NTNU-RESIW-GDMS-GDOES

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NTNU Glow Discharge Mass Spectrometry and Glow Discharge Optical Emission Spectroscopy

TA43 – NTNU-RESIW-GDMS-GDOES 

Location

Sem Saelandsvei 12

7434 Trondheim,  Norway 

Description

Main application: bulk elemental analysis with part-per-billion sensitivity.

• Recommended for: metal alloys, composite materials, silicon wafers, solar cells.

• Also possible: depth profiling of coatings, diffusion layers (only few elements in one measurement).

Glow Discharge Optical Emission Spectroscopy
Main application: elemental analysis (ppm sensitivity) as a function of depth (down to 150 um depth with nm resolution).

• Depth profiling of materials: from thin films (a few nanometers) to bulk (depth of tens of micrometers) at high depth resolution and in a short time.

• GD-OES can evaluate various materials, including metals, insulation films (e.g., glass) and organic films.

Atoms are sputtered from the sample surface in an argon glow discharge. The sputtered atoms recombine with electrons in the plasma discharge.

The light emitted from this recombination is analyzed using an optical emission spectrometer to obtain a depth profile of chemical composition (down to ppm sensitivity):

Testing Capabilities

For chemical analysis of materials under investigation: doping in Si ingots and wafers, passivated layers, battery materials, perovskites etc.

Technical Equipment

Glow Discharge Mass Spectrometry (GDMS) and Glow Discharge Optical Emission Spectroscopy (GDOES) are tools for chemical analysis.

GDMS: it is very sensitive and can measure impurities in very low concentration. Detection limits below ppmw. It can be used for doping and other impurities measurements in PV silicon.

GDOES: it is less sensitive than GDMS in terms of detection limits. However, this technique is very convenient if one need good depth resolution. For example, it can be used to analyse thin passivated layers in Si wafers. The depth resolution is within nanometer scale.

Additional information

Technology Readiness Level: 4-6

Special considerations: N/A 

Technology clusters: Materials for Energy, PV

Website: https://www.ntnu.no/wiki/display/imtlab/GD-MS

Availability: Not available from November 2024 to December 2025

Provision of tools to prepare data sets in a FAIR way:  No 

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